October 13,2026
When bearings operate in a "clean working environment," the core requirements are low particle generation, low outgassing, and no lubricant scatter, to avoid contaminating the product itself. These environments typically have extremely strict limits on airborne particle concentration levels.
Semiconductor and LCD Manufacturing Equipment
This is the most typical application for cleanroom bearings. In semiconductor manufacturing, even microscopic particles can affect chip yield—a single 0.01μm particle can cause problems. If the joint bearings of wafer transfer robots generate particles or outgassing during forward/reverse rotation or oscillation, they can directly contaminate wafers. Applications cover lithography, coating, etching, sputtering, and other equipment.
Thin-Film Manufacturing Equipment
This includes organic EL (OLED) manufacturing equipment and high-performance thin-film manufacturing equipment, which similarly require bearings that do not generate particles or gas emissions that could contaminate the film during operation.
Medical and Pharmaceutical Equipment (Cleanrooms/Isolators)
Scenarios such as sterile syringe kit packaging isolators and medical device manufacturing require bearings that are lubrication-free, low-particle-generating, and resistant to chemical disinfection in Class A cleanroom environments.
Food and Hygiene Environments
Although belonging to a broader "clean" category, hygiene environments differ from cleanrooms: cleanrooms focus on particle and outgassing contamination of products, while hygiene environments focus more on whether lubricants are compliant (e.g., food-grade) and whether they resist washdown and chemical corrosion.
Vacuum Environments
Ultra-high vacuum is an extension of clean environments. Vacuum environments require not only low particle generation but also extremely low outgassing, because any released gas will degrade the vacuum level and contaminate the process.
Pure Grease-Filled Bearings (Stainless Steel Base)
These use stainless steel bearings as a base, filled with specially formulated cleanroom grease. LG2 and LGU greases are suitable for atmospheric, room-temperature clean conditions; FG9/DL2 fluorine-based grease is suitable for atmospheric to vacuum environments with excellent heat resistance. Features include minimal grease scatter and particle generation, and long life.
DFO Bearings (Pure Lubricant Coating Type)
Inner and outer rings, balls, and cages are all coated with ultra-low vapor pressure lubricating films. E-DFO is a hydrocarbon oil coating; V-DFO is a fluorine-based oil coating. They generate fewer particles than cleanroom grease-filled bearings and have extremely low outgassing. Suitable for atmospheric to vacuum clean environments, they represent a new concept in bearings combining long life with high cleanliness.
Solid Lubricant Coated Bearings (Fluorine-Based Polymer Coating)
Solid lubrication is achieved by applying a fluorine-based polymer coating to the rolling surfaces. JTEKT models such as SEZZSTPRZ achieve a service life more than 10 times that of standard types, suitable for Class 10 cleanliness levels, with a temperature range of -30 to 200°C, used in semiconductor manufacturing, lithography, and vacuum motors. High-temperature Clean Pro bearings extend the operating temperature to 260°C.
Full Ceramic Bearings (Silicon Nitride)
Inner and outer rings and balls are all made of silicon nitride ceramic, combined with fluorine-based self-lubricating cages. They offer extremely high corrosion and wear resistance, are non-magnetic, and are suitable for clean, vacuum, and corrosive conditions. CEROBEAR ceramic bearings can achieve a service life up to 100 times that of standard steel bearings.
Hybrid Ceramic Bearings (Stainless Steel Rings + Ceramic Balls)
Precipitation-hardening stainless steel rings with silicon nitride ceramic balls and fluorine-based resin cages. Suitable for clean environments requiring corrosion resistance, such as chemical manufacturing equipment, food machinery, and cleaning equipment.
Engineering Plastic Bearings
igus xiros series are made from high-performance engineering plastics (xirodur C160/C161), completely lubrication-free and maintenance-free, with high wear resistance and chemical resistance, and extremely low particle emission. Suitable for medium-speed, light-load applications such as conveyor rollers and lightweight robotic arms in battery production and the semiconductor industry.
Air Bearings and Magnetic Levitation Bearings (Non-Contact Solutions)
Air bearings achieve completely non-contact support through an air film, theoretically producing no friction or particles, suitable for linear motion applications with extremely high cleanliness requirements. Active magnetic bearings (AMB) support the shaft through electromagnetic force, also achieving non-contact operation, and research has verified that they meet ISO Class 5 cleanliness standards.
Key Selection Considerations
The selection of cleanroom bearings depends not only on ring and rolling element materials but also critically on the lubrication method (grease lubrication, oil coating, solid coating, or completely lubrication-free) and cage material (fluorine-based resin, PEEK, PTFE coating, etc.), which together determine the levels of particle generation and outgassing.
If your equipment requires customized bearings for Clean Working Environment but standard bearings cannot meet the requirements, please feel free to contact us. We can provide customized solutions tailored to your specific needs.
